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Innovation application: Nanoscale Surface Topography Measurements with an Atomic Force Microscope

Title Nanoscale Surface Topography Measurements with an Atomic Force Microscope
Abstract

An atomic force microscope is a device for nanoscale surface structure analysis and imaging of different surface phases. The atomic force microscope does not use lenses or beam irradiation, therefore it does not suffer from a limitation in spatial resolution due to diffraction. To achieve best images samples should be as small as possible.

Keywords atomic force microscope, surface topography, nano size
Authors Māris Knite
Astrīda Bērziņa
Pāvels Onufrijevs
Artis Linarts
Department (14500) Tehniskās fizikas institūts
Statistical Classification of Economic Activities, NACE 2 Architectural and engineering activities; technical testing and analysis
Scientific research and development
Other professional, scientific and technical activities
Description of the technology

We offer surface topography imaging with an atomic force microscope. Depending on sample specifications the largest area of imaging is 135 x 135 um, surface roughness upper limit should be lower than 5 – 7 um. Samples geometrical dimension should not exceed 5 x 5 x 2 cm (length; width; thickness) and weight up to 200 g. Higher surface topography imaging resolution can be achieved for thin (up to 200um) and small samples (up to 3 cm2) with weight lower than 10 grams.

Fig. 1. Surface image of thin polymer layer a) 3D image and b) 2D image.

Larger and heavier samples have generally higher momentum that complicates the measurements with longer time consumption and artifacts – measurement noise that lowers the imaging quality.

Applications Atomic force microscope is a device for nanoscale surface structure analysis and imaging of different surface phases. These parameters are one of the most decisive factors for evaluation of surface properties and are important, for example, for thin film technologies or quality evaluation of monocrystalline substrates (wafers).
Advantages

Possibility to achieve information of surface nanosize relief nuances. The atomic force microscope does not use lenses or beam irradiation, therefore it does not suffer from a limitation in spatial resolution due to diffraction.

Technology Readiness Level Actual system proven in operational environment
Partnership offer • Service contracts.
ID 99
Contact information Linda Šufriča, e-mail: inovacijas@rtu.lv; phone.: 28442736