The deposition of functional films on a flexible substrate as textiles by sputter coating has attracted a great deal of attention in recent years. Sputtering has opened up new possibilities in the functionalization of textiles and is an exciting prospect for usage in textile design and technical textiles. In this study magnetron sputtering application is evaluated for the deposition of metal thin films on different cotton substrates, during experiment six types of commercial cotton fabrics were functionalized by magnetron sputtering. Analysis of the surface of the metal coated textiles realized by scanning electron microscopy, atomic force microscopy and non-contact optical method based on the difference of uncoated and coated fabric surface reflection mechanisms that lend to get a detailed insight to the textile surface changes after it coating by metal and exploitation.