Today, mechanical engineering is connected with more precise measurements. Especially it is important for elastic machine elements and nanocoatings, which are used for friction surfaces, contacting parts, corrosion surfaces, conducting films etc. In this paper measurement error is described taking into consideration parameters of new ISO standard (EN ISO 25178) for 3D surface texture. The given paper studies contact of rough surfaces, probability distribution of peak height and influence of material characteristics on measurement error. © 2014 The Authors. Published by Elsevier Ltd.