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Publikācija: Formation of Buried Layers by Laser Radiation

Publication Type Conference paper
Funding for basic activity Unknown
Defending: ,
Publication language English (en)
Title in original language Formation of Buried Layers by Laser Radiation
Field of research 1. Natural sciences
Sub-field of research 1.3 Physical sciences
Authors Artūrs Medvids
Jevgenijs Kaupužs
Keywords Buried layer, Laser Radiation, CO2
Abstract New conception and both experimental anid theoretical results regarding buried layers formation and control of their depth anid thickness are presented. Effect of the CO2laser radiation on distribution and state of oxygen or nitrogen atoms, implanted in silicon wafer, is investigated experimentally. A model is proposed and equations are obtained descrbing the process of buried layer's foruation from impurities, introduced inside the crystal, in presence of the temperature gradient. An interaction between impurities is taken into account.
Hyperlink: http://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=5435865 
Reference Medvids, A., Kaupužs, J. Formation of Buried Layers by Laser Radiation . In: Proceedings of the 25th European Solid State Device Research Conference (ESSDERC '95), Netherlands, Hague, 22-26 September, 2014. Piscataway: IEEE, 2014, pp.671-674. ISBN 286332182X.
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ID 19465