Characterisation of Silicon Nitride Coatings Irradiated with Accelerated Electrons and Bremsstrahlung Radiation

International Conference "Functional Materials and Nanotechnologies 2017" (FMNT-2017): Book of Abstracts 2017
Liga Avotina, Roberts Zarins, Marina Romanova, Elina Pajuste, Aleksandrs Zaslavskis, Jurijs Dehtjars, Gunta Kizane

In this research, influence of relatively low doses of ionizing radiation on chemical bonds of the single-layered and three-layered Si3N4 was studied.

Keywords
silicon nitride, nanocapacitor, dielectric nanolayer, ionizing radiation

Avotina, L., Zarins, R., Romanova, M., Pajuste, E., Zaslavskis, A., Dehtjars, J., Kizane, G. Characterisation of Silicon Nitride Coatings Irradiated with Accelerated Electrons and Bremsstrahlung Radiation. In: International Conference "Functional Materials and Nanotechnologies 2017" (FMNT-2017): Book of Abstracts, Estonia, Tartu, 24-27 April, 2017. Tartu: 2017, pp.131-131. ISBN 978-9985-4-1030-1.

Publication language
English (en)