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Publikācija: Influence of Ionizing Radiation on the Si3N4 Coatings on Si Substrate

Publication Type Conference paper
Funding for basic activity EU Structural Funds
Defending: ,
Publication language English (en)
Title in original language Influence of Ionizing Radiation on the Si3N4 Coatings on Si Substrate
Field of research 1. Natural sciences
Sub-field of research 1.3 Physical sciences
Authors Liga Avotina
Roberts Zarins
Elina Pajuste
Marina Romanova
Juris Bitenieks
Jānis Zicāns
Aleksandrs Zaslavskis
Jurijs Dehtjars
Gunta Kizane
Keywords silicon nitride, nanocapacitor, dielectric nanolayer, ionizing radiation
Abstract To use the Si3N4 as insulating layer in capacitors for space applications, it is important to estimate behaviour of these layers under action of ionizing radiation.
Reference Avotina, L., Zarins, R., Pajuste, E., Romanova, M., Bitenieks, J., Zicāns, J., Zaslavskis, A., Dehtjars, J., Kizane, G. Influence of Ionizing Radiation on the Si3N4 Coatings on Si Substrate. In: 19th International Conference-School "Advanced Materials and Technologies 2017": Book of Abstracts, Lithuania, Palanga, 27-31 August, 2017. Kaunas: 2017, pp.80-80. ISSN 1822-7759.
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