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Publikācija: Surface Morphology of Single and Multilayered Silicon Nitride Dielectric Nanocoatings

Publication Type Conference paper
Funding for basic activity Research project
Defending: ,
Publication language English (en)
Title in original language Surface Morphology of Single and Multilayered Silicon Nitride Dielectric Nanocoatings
Field of research 2. Engineering and technology
Sub-field of research 2.2 Electrical engineering, Electronic engineering, Information and communication engineering
Authors Elina Pajuste
Marina Romanova
Līga Avotiņa
Gennady Enichek
Aleksandrs Zaslavskis
Valentina Kinerte
Jurijs Dehtjars
Gunta Ķizāne
Keywords silicon nitride, microscopy, surface morphology, nanocapacitor
Abstract -
Reference Pajuste, E., Romanova, M., Avotiņa, L., Enichek, G., Zaslavskis, A., Kinerte, V., Dehtjars, J., Ķizāne, G. Surface Morphology of Single and Multilayered Silicon Nitride Dielectric Nanocoatings. In: 20th International Conference-School "Advanced Materials and Technologies": Book of Abstracts, Lithuania, Palanga, 27-31 August, 2018. Kaunas: 2018, pp.43-43. ISSN 1822-7759.
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ID 27664