Electrical Properties of Single and Multilayer Silicon Nitride Dielectric for Applications in Nanocapacitors
21st International Conference-School "Advanced Materials and Technologies 2019": Book of Abstracts 2019
Līga Avotiņa, Marina Romanova, Elina Pajuste, Gennady Enichek, Aleksandrs Zaslavskis, Jurijs Dehtjars, Gunta Ķizāne

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Keywords
silicon nitride, nanocapacitor, dielectric, capacitor

Avotiņa, L., Romanova, M., Pajuste, E., Enichek, G., Zaslavskis, A., Dehtjars, J., Ķizāne, G. Electrical Properties of Single and Multilayer Silicon Nitride Dielectric for Applications in Nanocapacitors. In: 21st International Conference-School "Advanced Materials and Technologies 2019": Book of Abstracts, Lithuania, Palanga, 19-23 August, 2019. Kaunas: 2019, pp.53-53. ISSN 1822-7759.

 Publication language
English (en)
  • Publication Type
    Conference paper
  • Funding for basic activity
    Research project
  • Field of research
    2. Engineering and technology
  • Sub-field of research
    2.2 Electrical engineering, Electronic engineering, Information and communication engineering
  • Research platform
    Materials, Processes, and Technologies
  • ID: 29422
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