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Publikācija: Electrical Properties of Single and Multilayer Silicon Nitride Dielectric for Applications in Nanocapacitors

Publication Type Conference paper
Funding for basic activity Research project
Defending: ,
Publication language English (en)
Title in original language Electrical Properties of Single and Multilayer Silicon Nitride Dielectric for Applications in Nanocapacitors
Field of research 2. Engineering and technology
Sub-field of research 2.2 Electrical engineering, Electronic engineering, Information and communication engineering
Research platforms Materials, Processes, and Technologies
Authors Līga Avotiņa
Marina Romanova
Elina Pajuste
Gennady Enichek
Aleksandrs Zaslavskis
Jurijs Dehtjars
Gunta Ķizāne
Keywords silicon nitride, nanocapacitor, dielectric, capacitor
Abstract .
Reference Avotiņa, L., Romanova, M., Pajuste, E., Enichek, G., Zaslavskis, A., Dehtjars, J., Ķizāne, G. Electrical Properties of Single and Multilayer Silicon Nitride Dielectric for Applications in Nanocapacitors. In: 21st International Conference-School "Advanced Materials and Technologies 2019": Book of Abstracts, Lithuania, Palanga, 19-23 August, 2019. Kaunas: 2019, pp.53-53. ISSN 1822-7759.
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