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Publikācija: XPS

Publication Type Conference paper
Funding for basic activity Research project
Defending: ,
Publication language English (en)
Title in original language XPS, FTIR and Photoelectron Emission Spectroscopies to Analyze Nanocapacitor Silicon Nitride Nano Layered Structures
Field of research 2. Engineering and technology
Sub-field of research 2.2 Electrical engineering, Electronic engineering, Information and communication engineering
Research platforms Materials, Processes, and Technologies
Authors Mindaugas Andrulevičius
Līga Avotiņa
Jurijs Dehtjars
Gennady Enichek
Marina Romanova
Evgeny Shulzinger
Hermanis Sorokins
Sigitas Tamulevičius
Aleksandrs Viļķens
Aleksandr Zaslavski
Keywords silicon nitride, nanocapacitor, capacitor
Abstract The purpose of this study was to identify the influence of the number of dielectric Si3N4 nanolayers on the quality of nanocapacitors.
Hyperlink: http://icnmsme2019.web.ua.pt/wp-content/uploads/2019/07/ICNMSME2019.pdf 
Reference Andrulevičius, M., Avotiņa, L., Dehtjars, J., Enichek, G., Romanova, M., Shulzinger, E., Sorokins, H., Tamulevičius, S., Viļķens, A., Zaslavski, A. XPS, FTIR and Photoelectron Emission Spectroscopies to Analyze Nanocapacitor Silicon Nitride Nano Layered Structures. In: 2nd International Conference on Nanomaterials Science and Mechanical Engineering: Book of Abstracts, Portugal, Aveiro, 9-12 July, 2019. Aveiro: 2019, pp.106-106. ISBN 978-972-789-544-1.
Full-text
ID 29431