Oxide semiconductor nanoparticles in hole scavenging media exhibit photochromic effect due to accumulation of itinerant electrons in the conduction band and formation energy states within the band gap [1]. This process looks attractive also for synthesis of transparent conductive oxides (TCO). However, a photodoped itinerant electrons are not stable and diminish upon air exposure and thus can’t be applied for TCO synthesis. Donor dopant such as Al or Ga itself produce an itinerant electron within the conduction band of ZnO. However, not every substituting cation serves electron. The electronegativity formed due to donor insertion into the ZnO lattice can be compensated also by other point defects, such as cation vacancies and interstitial oxygen. This is the case for many TCOs which limits their applications for conductive films.