Phase Transition in Laser Irradiated TiO2 Thin Films

5th International Conference on Nanotechnologies and Biomedical Engineering (ICNBME 2021). IFMBE Proceedings. Vol.87 2022
Ion Lungu, L. Ghimpu, T. Potlog, Artūrs Medvids, C. Moise

In this study, the laser processing of thermally annealed TiO2 thin films at 420 ℃ in hydrogen atmosphere, utilizing an pulsed fourth-harmonic generation Nd: YAG laser employing different laser intensities in the atmosphere at room temperature, has been reported. Further, the surface morphology and crystalline structure have been investigated by means of atomic force microscopy [AFM], X-ray diffraction [XRD], Raman analysis. The AFM images obtained show that the film’s surface changes as the effect of the laser processes. Moreover, XRD and Raman analysis of the TiO2 thin films indicate at the threshold laser intensity, Ith = 66 MW/cm2 of the fourth-harmonic generation Nd: YAG laser phase transition from atanase-rutile to a crystalline 100% rutile.

Keywords
Laser processing | Raman analysis | RF magnetron sputtering method | TiO thin films 2 | XRD
DOI
10.1007/978-3-030-92328-0_6
Hyperlink
https://link.springer.com/chapter/10.1007/978-3-030-92328-0_6

Lungu, I., Ghimpu, L., Potlog, T., Medvids, A., Moise, C. Phase Transition in Laser Irradiated TiO2 Thin Films. In: 5th International Conference on Nanotechnologies and Biomedical Engineering (ICNBME 2021). IFMBE Proceedings. Vol.87, Moldova, Chisinau, 3-5 November, 2021. Cham: Springer, 2022, pp.40-47. ISBN 978-3-030-92327-3. e-ISBN 978-3-030-92328-0. ISSN 1680-0737. e-ISSN 1433-9277. Available from: doi:10.1007/978-3-030-92328-0_6

Publication language
English (en)