Graphitization of Amorphous Diamond-like Carbon Films by Laser Irradiation

Optical Materials 2008
Alfonsas Grigonis, Artūrs Medvids, Pāvels Onufrijevs, Jurgis Babonas, Alfonsas Reza

Amorphous diamond-like hydrogenated carbon, or a-C:H, films were deposited on Si wafers by means of direct ion beam deposition from acetylene or from a gaseous mixture of acetylene and hydrogen. The samples were irradiated by the second harmonic (532 nm) of a Q-switched YAG:Nd laser. The effect of laser irradiation was studied with Raman and infrared spectroscopy and spectroscopic ellipsometry. Changes in the optical spectra of samples of various H content were investigated depending on laser intensity. Experimental data were interpreted taking into account the structural transformations of a-C:H films.

Keywords
Amorphous diamond-type carbon films; Laser irradiation; Optical properties
DOI
10.1016/j.optmat.2007.02.027
Hyperlink
http://www.sciencedirect.com/science/article/pii/S0925346707000729

Grigonis, A., Medvids, A., Onufrijevs, P., Babonas, J., Reza, A. Graphitization of Amorphous Diamond-like Carbon Films by Laser Irradiation. Optical Materials, 2008, Vol.30, Iss.5, pp.749-752. ISSN 0925-3467. Available from: doi:10.1016/j.optmat.2007.02.027

Publication language
English (en)