Study of Transparent Conductive Oxides Vacuum Nanocoatings Characteristics
2012
Ingūna Strazdiņa

Defending
19.03.2013. 15:00, Transporta un mašīnzinību fakultāte, Ezermalas ielā 6k, 405

Supervisor
Jānis Rudzītis, Viktors Kozlovs

Reviewers
Jurijs Dehtjars, Aleksandrs Šostaks, Sigitas Tamulevičius

Doctoral Theses „Study of transparent conductive oxide vacuum nanocoatings characteristics” represents developed, on fuzzy logic based model for forecasting of transparent conductive oxide coating specific resistivity as well as developed deposition process with the necessary process parameters for indium tin oxide magnetron sputtering on polymeric film using HIPIMS power supply in industrial scale. Also improved zinc oxide doped with aluminium deposition process on polymeric film with the necessary process parameters that provide indium tin oxide coating equivalent properties are presented. The thesis is written in Latvian, contains an introduction, four chapters, conclusions, references, 4 appendices, 62 figures, 7 tables that are presented in 100 pages. The list of references has 90 sources.


Keywords
Magnetron Sputtering, High Power Impulse Magnetron Sputtering, indium tin oxide, aluminium doped zinc oxid

Strazdiņa, Ingūna. Study of Transparent Conductive Oxides Vacuum Nanocoatings Characteristics. PhD Thesis. Rīga: [RTU], 2012. 100 p.

Publication language
Latvian (lv)
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