Quality and property of films on the glass depend on surface of substrate. The different chemical methods for surface modification of soda-lime-silicate glass - microscope slides as well as glass fibre adopted such etching in alkali or acid solutions. Etching methods enlarge surface area and generate a new surface by removing material from original glass. Etching mechanisms strongly depend on the pH contacting solution. Products of interaction with surface and etching media have been removed by washing specimens in different regime with C2H5OH or mix of C2H5OH/HCl. The glass surface was examined by AFM, SEM, XRD. The obtained results illustrated that surface property and morphology of glass are changed by medium and regime of etching. Hydrothermal treatment of soda-lime-silicate glass with NaOH caused hydroxyl ion attack to silica network, converting bridging oxygen into a non-bridging one, thus disrupting the network. Gel-like layer formed during etching by NaOH solution typically provided smoothening effect of surface. Topography obtained by AFM showed channel like structure. The depth of channel can modify in nanoscale range. Intensity of roughness depends on pH solution and handling time. Structured soda-lime-silicate glass surface with holes and cavities could be obtained by combinations of etching acid media (H2SO4 or HF) and treatment regimes. The atomic percentage of sodium on surface decreases by treatment with H2SO4. New generation of high silica materials was created by leaching of soda-silicate glass fibre. The amount of silicon on glass surface increased up to 96 %. Amount and size of cavities has been handled by etching time. Treatment with HF decreased amount of silicon on surface and roughness of surface of substrate. AFM showed average roughness 2.1 …6.8 nm. Etched surface of flat glass and glass fibre was performed for deposition and immobilization oxide nanoparticles composition by sol-gel dip-coating method.