Influence of Powerful Laser Radiation on Formation of Pores in Si by Electrochemical Etching
Journal of Automation, Mobile Robotics & Intelligent Systems 2009
Artūrs Medvids, Pāvels Onufrijevs, Leonid Fedorenko, Mykola Yusupov, Edvīns Daukšta

The influence of strongly absorbing N laser radiation on pores formation on a surface of Si single crystal has be- en investigated using optical microscope and atomic force microscope. After irradiation by the laser and subsequent electrochemical etching in HF acid solution morphological changes of the irradiated parts of a surface of Si were ob- served. At the same time, pores formation on the non- irradiated parts of Si surface took place. The porous part of the Si surface is characterized by strong photolumines- cence in red part of spectra with maximum at 1.88 eV. Suppression of the pores formation by laser radiation is ex- plained with inversion of Si type condition from p to n. This fact is explained by Thermogradient effect - generation and redistribution of the intrinsic defects in gradient of tempe- rature. It was shown that the depth of p-Si layer on n-Si substrate depends on intensity of laser radiation and it in- creases with intensity of laser radiation. The results of the investigation can be used for optical recording and storage of information on surface of semiconductors.


Keywords
porous Si, laser, optical storage, chemical etching
Hyperlink
http://www.jamris.org/images/ISSUES/ISSUE-2009-04/048%20JAMRIS%20No12%20-%20Dauksta.pdf

Medvids, A., Onufrijevs, P., Fedorenko, L., Yusupov, M., Daukšta, E. Influence of Powerful Laser Radiation on Formation of Pores in Si by Electrochemical Etching. Journal of Automation, Mobile Robotics & Intelligent Systems, 2009, Vol.3, No.4, pp.166-168. e-ISSN 2080-2145. ISSN 1897-8649.

Publication language
English (en)
The Scientific Library of the Riga Technical University.
E-mail: uzzinas@rtu.lv; Phone: +371 28399196