Study of Inductive Coupled Hydrogen and Argon Plasma Interaction with SiO2 Glass

Plasma Processes and Polymers 2009
Zanda Gavare, Gita Rēvalde, Atis Skudra, Natalia Zorina

This work is devoted to the diagnostics of interaction between hydrogen and argon with the surface of SiO2 glass walls. For diagnostics of the interaction, special high-frequency electrodeless light sources were prepared, filled with pure argon of 1 Torr or argon-hydrogen of total pressure of 1 Torr (Ar/H2 mixing ratio is 9:1).

DOI
10.1002/ppap.200930508
Hipersaite
http://onlinelibrary.wiley.com/doi/10.1002/ppap.200930508/pdf

Gavare, Z., Rēvalde, G., Skudra, A., Zorina, N. Study of Inductive Coupled Hydrogen and Argon Plasma Interaction with SiO2 Glass. Plasma Processes and Polymers, 2009, Vol.6, Iss. Suppl.1, 183.-186.lpp. ISSN 1612-8850. Pieejams: doi:10.1002/ppap.200930508

Publikācijas valoda
English (en)