Investigation of Method of Pulsed Laser Deposition

Production Engineering: Nanotehnology, Surface 3D Roughness, Vacuum Chamber 2012
Natālija Bulaha, Tatjana Fiļipova

In this work it has been considered and evaluated the essence of method of pulsed laser deposition: the nature of the process, advantages and disadvantages of the method, its differences from another variants of coating deposition, coatings properties evaluation, produced in this way, working principles of PLD (pulsed laser deposition) machine and its basic components, uses of the method, perspective of using pulsed laser deposition.

Atslēgas vārdi
Deposition, coating, microparticles, substrate

Bulaha, N., Fiļipova, T. Investigation of Method of Pulsed Laser Deposition. No: Production Engineering: Nanotehnology, Surface 3D Roughness, Vacuum Chamber. Riga: Riga Technical University, 2012, 6.-10.lpp. ISBN 978-9984-9990-6-7.

Publikācijas valoda
English (en)