Screen Printing of SU-8 Layers for Microstructure Fabrication
Latvian Journal of Physics and Technical Sciences 2015
Jānis Kļaviņš, Gatis Mozoļevskis, Ainārs Ozols, Edgars Nitišs, Mārtiņš Rutkis

We report on a screen printing fabrication process for large-area SU-8 layers utilised for the preparation of microstructures in display devices such as microelectronic, electrowetting or bistable devices. The screen printing method has been selected for its effectiveness and simplicity over traditionally used spin-coating ones. Layers and microstructures produced thereof have shown proper homogeneity. Relationships between screen parameters to coating thickness have been established. Coating on an ITO (indium tin oxide) hydrophobic surface is possible when surface has been treated by UV/Ozone to increase its aqueous ability. To this end, the hydrophilic microstructure grids have been successfully built on a hydrophobic layer by screen printing and traditional lithography processes. Compared to conventional spin-coating methods, the screen printing method offers the advantages of simple, cheap and fast fabrication, and is especially suitable for large-area display fabrication.

Atslēgas vārdi
pixel walls | screen printing | SU-8

Kļaviņš, J., Mozoļevskis, G., Ozols, A., Nitišs, E., Rutkis, M. Screen Printing of SU-8 Layers for Microstructure Fabrication. Latvian Journal of Physics and Technical Sciences, 2015, Vol.52, No.5, 58.-67.lpp. ISSN 0868-8257. Pieejams: doi:10.1515/lpts-2015-0029

Publikācijas valoda
English (en)
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