Influence of Ionizing Radiation on the Si3N4 Coatings on Si Substrate

19th International Conference-School "Advanced Materials and Technologies 2017": Book of Abstracts 2017
Liga Avotina, Roberts Zarins, Elina Pajuste, Marina Romanova, Juris Bitenieks, Jānis Zicāns, Aleksandrs Zaslavskis, Jurijs Dehtjars, Gunta Kizane

To use the Si3N4 as insulating layer in capacitors for space applications, it is important to estimate behaviour of these layers under action of ionizing radiation.

Atslēgas vārdi
silicon nitride, nanocapacitor, dielectric nanolayer, ionizing radiation

Avotina, L., Zarins, R., Pajuste, E., Romanova, M., Bitenieks, J., Zicāns, J., Zaslavskis, A., Dehtjars, J., Kizane, G. Influence of Ionizing Radiation on the Si3N4 Coatings on Si Substrate. No: 19th International Conference-School "Advanced Materials and Technologies 2017": Book of Abstracts, Lietuva, Palanga, 27.-31. augusts, 2017. Kaunas: 2017, 80.-80.lpp. ISSN 1822-7759.

Publikācijas valoda
English (en)