Surface Morphology of Single and Multilayered Silicon Nitride Dielectric Nanocoatings

20th International Conference-School "Advanced Materials and Technologies": Book of Abstracts 2018
Elina Pajuste, Marina Romanova, Līga Avotiņa, Gennady Enichek, Aleksandrs Zaslavskis, Valentina Kinerte, Jurijs Dehtjars, Gunta Ķizāne

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Atslēgas vārdi
silicon nitride, microscopy, surface morphology, nanocapacitor

Pajuste, E., Romanova, M., Avotiņa, L., Enichek, G., Zaslavskis, A., Kinerte, V., Dehtjars, J., Ķizāne, G. Surface Morphology of Single and Multilayered Silicon Nitride Dielectric Nanocoatings. No: 20th International Conference-School "Advanced Materials and Technologies": Book of Abstracts, Lietuva, Palanga, 27.-31. augusts, 2018. Kaunas: 2018, 43.-43.lpp. ISSN 1822-7759.

Publikācijas valoda
English (en)