Electrical Properties of Single and Multilayer Silicon Nitride Dielectric for Applications in Nanocapacitors

21st International Conference-School "Advanced Materials and Technologies 2019": Book of Abstracts 2019
Līga Avotiņa, Marina Romanova, Elina Pajuste, Gennady Enichek, Aleksandrs Zaslavskis, Jurijs Dehtjars, Gunta Ķizāne

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Atslēgas vārdi
silicon nitride, nanocapacitor, dielectric, capacitor

Avotiņa, L., Romanova, M., Pajuste, E., Enichek, G., Zaslavskis, A., Dehtjars, J., Ķizāne, G. Electrical Properties of Single and Multilayer Silicon Nitride Dielectric for Applications in Nanocapacitors. No: 21st International Conference-School "Advanced Materials and Technologies 2019": Book of Abstracts, Lietuva, Palanga, 19.-23. augusts, 2019. Kaunas: 2019, 53.-53.lpp. ISSN 1822-7759.

Publikācijas valoda
English (en)